Laterally Driven Polysilicon Resonant Microstructures
- 15 November 1989
- journal article
- Published by Elsevier BV in Sensors and Actuators
- Vol. 20 (1-2), 25-32
- https://doi.org/10.1016/0250-6874(89)87098-2
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Surface-micromachining processes for electrostatic microactuator fabricationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Mechanical properties of fine grained polysilicon-the repeatability issuePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Characterization of the mechanisms producing bending moments in polysilicon micro-cantilever beams by interferometric deflection measurementsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Design and calibration of a microfabricated floating-element shear-stress sensorIEEE Transactions on Electron Devices, 1988
- Resonant-microbridge vapor sensorIEEE Transactions on Electron Devices, 1986
- A simple technique for the determination of mechanical strain in thin films with applications to polysiliconJournal of Applied Physics, 1985
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984
- Young’s modulus measurements of thin films using micromechanicsJournal of Applied Physics, 1979