Atomic-resolution incoherent high-angle annular dark field STEM images of Si(011)

Abstract

Characteristic atomic-resolution incoherent high-angle annular dark field (HAADF) scanning transmission electron microscope (STEM) images of [011]-orientated Si have been experimentally obtained by a through-focal series. Artificial bright spots appear at positions where no atomic columns exist along the electron beam, in some experimental images. Image simulation, based on the Bloch wave description by the Bethe method, reproduces the through-focal experimental images. It is shown that atomic-resolution HAADF STEM images, which are greatly influenced by the Bloch wave field depending on the incident electron beam probe, cannot always be interpreted intuitively as the projected atomic images. It is also found that the atomic-resolution HAADF STEM images can be simply explained using the relations to the probe functions without the need for complex dynamical simulations.