Amorphous Silicon 3-D Tapers for Si Photonic Wires Fabricated With Shadow Masks
- 1 August 2008
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 20 (17), 1452-1454
- https://doi.org/10.1109/lpt.2008.927891
Abstract
Three-dimensional taper structures made from plasma-enhanced chemical vapor-deposited hydrogenated amorphous silicon were evaluated by calculating the deposition profiles with a line-of-sight model and the corresponding mode profiles with a full-vectorial mode solver. The tapers were fabricated with shadow-masks made from KOH-etched Si wafers, and with the tapers light was coupled into 500-nm-wide photonic wires from lensed fibers.Keywords
This publication has 12 references indexed in Scilit:
- A silicon-based spot-size converter between single-mode fibers and Si-wire waveguides using cascaded tapersApplied Physics Letters, 2007
- High efficiency grating coupler between silicon-on-insulator waveguides and perfectly vertical optical fibersOptics Letters, 2007
- A high-performance micro-GRIN-chip spot-size converter formed with focused ion beamIEEE Photonics Technology Letters, 2006
- Single layer a-Si GRIN waveguide coupler with lithographically defined facetsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Leakage loss in trench-bulge waveguidesJournal of Lightwave Technology, 2005
- Low-loss singlemode amorphous silicon waveguidesElectronics Letters, 2005
- Fabrication and characterization of three-dimensional silicon tapersOptics Express, 2003
- Nanotaper for compact mode conversionOptics Letters, 2003
- Low loss mode size converter from 0.3 [micro sign]m square Si wire waveguides to singlemode fibresElectronics Letters, 2002
- 3D mode converters for SOI integrated opticsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002