3D mode converters for SOI integrated optics

1 January 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

p. 165-166
https://doi.org/10.1109/soi.2002.1044461

Abstract

This paper reports on the development of a new mode converter technology for the growing SOI integrated optics field. Mode converters were designed and fabricated to permit efficient coupling of typical 10-/spl mu/m diameter optical fiber modes to single mode SOI waveguide structures as small as 0.25 /spl mu/m. A three-dimensional adiabatic taper approach was employed based on graytone lithography. This device is an important enabler for practical subwavelength SOI-waveguide integrated optics technology.

Keywords

SILICON ON INSULATOR TECHNOLOGY
OPTICAL FIBERS
OPTICAL WAVEGUIDES
INTEGRATED OPTOELECTRONICS

This publication has 1 reference indexed in Scilit:

Silicon-based optoelectronics
Proceedings of the IEEE, 1993

Cited by 4 articles