Low-loss singlemode amorphous silicon waveguides
- 1 January 2005
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 41 (25), 1377-1379
- https://doi.org/10.1049/el:20052387
Abstract
Amorphous silicon waveguides were obtained by plasma-enhanced chemical vapour deposition and anisotropic plasma etching. Rectangular multimode waveguides as well as singlemode ridge waveguides were fabricated. Scattered light measurements at 1550 nm (1300 nm) wavelength showed a low propagation loss of ≤0.5 dB/cm (1.6 dB/cm) for multimode waveguides and 2.0 dB/cm (5.0 dB/cm) for highly-confined singlemode waveguides.Keywords
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