Processing and characterisation of sol–gel deposited Ta2O5 and TiO2–Ta2O5 dielectric thin films
- 30 June 1999
- journal article
- Published by Elsevier BV in Solid-State Electronics
- Vol. 43 (6), 1095-1099
- https://doi.org/10.1016/s0038-1101(99)00031-3
Abstract
No abstract availableKeywords
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