High Coupling Efficiency Etched Facet Tapers in Silicon Waveguides

Abstract
We demonstrate a platform based on etched facet silicon inverse tapers for waveguide-lensed fiber coupling with a loss as low as 0.7 dB/facet. This platform can be fabricated on a wafer scale enabling mass-production of silicon photonic devices with broadband, high-efficiency couplers.
Funding Information
  • Defense Sciences Office, Defense Advanced Research Projects Agency, Small Business Technology Transfer (W91CRB-10-C-0099)
  • Cornell NanoScale Facility, a Member of the National Nanotechnology Infrastructure Network
  • National Science Foundation (ECCS-0335765)