Subwavelength Grating Structures in Silicon-on-Insulator Waveguides
Open Access
- 13 July 2008
- journal article
- research article
- Published by Hindawi Limited in Advances in Optical Technologies
- Vol. 2008, 1-8
- https://doi.org/10.1155/2008/685489
Abstract
First implementations of subwavelength gratings (SWGs) in silicon-on-insulator (SOI) waveguides are discussed and demonstrated by experiment and simulations. The subwavelength effect is exploited for making antireflective and highly reflective waveguide facets as well as efficient fiber-chip coupling structures. We demonstrate experimentally that by etching triangular SWGs into SOI waveguide facets, the facet power reflectivity can be reduced from 31% to 94% facet reflectivity can be achieved with square SWGs for 5 m thick SOI waveguides. Finally, SWG fiber-chip couplers for SOI photonic wire waveguides are introduced, including design, simulation, and first experimental results.
Keywords
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