Nano-scale fatigue study of LPCVD silicon nitride thin films using a mechanical-amplifier actuator
- 4 April 2007
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 17 (5), 938-944
- https://doi.org/10.1088/0960-1317/17/5/013
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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