A cryogenic measurement setup for microelectromechanical systems used in space applications
- 16 March 2005
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 76 (4)
- https://doi.org/10.1063/1.1884192
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Mechanical Property Characterization of LPCVD Silicon Nitride Thin Films at Cryogenic TemperaturesJournal of Microelectromechanical Systems, 2004
- Microshutter arrays for near-infrared applications on the James Webb Space TelescopePublished by SPIE-Intl Soc Optical Eng ,2003
- Characterization of Mechanical Properties of Silicon Nitride Thin Films for Space ApplicationsMRS Proceedings, 2003
- Status of the development of a 128x128 microshutter arrayPublished by SPIE-Intl Soc Optical Eng ,2000
- Programmable two-dimensional microshutter arraysPublished by SPIE-Intl Soc Optical Eng ,1999
- Mechanical properties of thin polysilicon films by means of probe microscopyPublished by SPIE-Intl Soc Optical Eng ,1998
- Bulk micromachining of siliconProceedings of the IEEE, 1998
- A new technique for measuring the mechanical properties of thin filmsJournal of Microelectromechanical Systems, 1997