Research on a new method for optimizing surface roughness of cavitation abrasive flow polishing monocrystalline silicon
- 10 February 2021
- journal article
- research article
- Published by Springer Science and Business Media LLC in The International Journal of Advanced Manufacturing Technology
- Vol. 113 (5-6), 1649-1661
- https://doi.org/10.1007/s00170-021-06667-6
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China (52075494,51605438)
- Natural Science Foundation of Zhejiang Province (LY19E050005)
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