Parameters optimization on surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process
- 1 October 2015
- journal article
- research article
- Published by Elsevier BV in Precision Engineering
- Vol. 42, 93-100
- https://doi.org/10.1016/j.precisioneng.2015.04.004
Abstract
No abstract availableKeywords
Funding Information
- National Science Council of the Republic of China (NSC 100-2221-E-011-026-MY3)
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