Carbon saturation of arrays of Ni catalyst nanoparticles of different size and pattern uniformity on a silicon substrate
- 8 July 2008
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 19 (33), 335703
- https://doi.org/10.1088/0957-4484/19/33/335703
Abstract
The kinetics of saturation of Ni catalyst nanoparticle patterns of the three different degrees of order, used as a model for the growth of carbon nanotips on Si, is investigated numerically using a complex model that involves surface diffusion and ion motion equations. It is revealed that Ni catalyst patterns of different degrees of order, with Ni nanoparticle sizes up to 12.5 nm, exhibit different kinetics of saturation with carbon on the Si surface. It is shown that in the cases examined (surface coverage in the range of 1-50%, highly disordered Ni patterns) the relative pattern saturation factor calculated as the ratio of average incubation times for the processes conducted in the neutral and ionized gas environments reaches 14 and 3.4 for Ni nanoparticles of 2.5 and 12.5 nm, respectively. In the highly ordered Ni patterns, the relative pattern saturation factor reaches 3 for nanoparticles of 2.5 nm and 2.1 for nanoparticles of 12.5 nm. Thus, more simultaneous saturation of Ni catalyst nanoparticles of sizes in the range up to 12.5 nm, deposited on the Si substrate, can be achieved in the low-temperature plasma environment than with the neutral gas-based process.Keywords
This publication has 37 references indexed in Scilit:
- Nanosphere monolayer-templated, ion-assisted nanofeature etching in dielectric materials: a numerical simulation of nanoscale ion flux topographyNanotechnology, 2008
- Near-field properties of a gold nanoparticle array on different substrates excited by a femtosecond laserNanotechnology, 2007
- Plasma-assisted self-organized growth of uniform carbon nanocone arraysCarbon, 2007
- Factors affecting synthesis of single wall carbon nanotubes in arc dischargeJournal of Physics D: Applied Physics, 2007
- A self-seeding coreduction method for shape control of silver nanoplatesNanotechnology, 2006
- Growth of carbon nanotubes on cobalt catalyst film using electron cyclotron resonance chemical vapour deposition without thermal heatingNanotechnology, 2006
- Supported Ag–TiO2core–shell nanofibres formed at low temperature by plasma depositionNanotechnology, 2006
- Current-driven ignition of single-wall carbon nanotubesCarbon, 2006
- Colloquium:Reactive plasmas as a versatile nanofabrication toolReviews of Modern Physics, 2005
- On the conditions of carbon nanotube growth in the arc dischargeNanotechnology, 2004