Optimization of electromechanical coupling for a thin-film PZT membrane: II. Experiment
- 9 August 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (10), 1804-1809
- https://doi.org/10.1088/0960-1317/15/10/003
Abstract
No abstract availableKeywords
This publication has 30 references indexed in Scilit:
- Efficiency of energy conversion for devices containing a piezoelectric componentJournal of Micromechanics and Microengineering, 2004
- Development of piezoelectric micromachined ultrasonic transducersSensors and Actuators A: Physical, 2004
- Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin FilmsJournal of Electroceramics, 2004
- Piezoelectric micromachined transducers (PMUT's) based on PZT thin filmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Design, fabrication and testing of the P3 micro heat engineSensors and Actuators A: Physical, 2003
- Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate filmsJournal of Applied Physics, 2001
- Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin filmsJournal of Applied Physics, 1999
- The wafer flexure technique for the determination of the transverse piezoelectric coefficient (d31) of PZT thin filmsSensors and Actuators A: Physical, 1998
- PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMSAnnual Review of Materials Science, 1998
- Piezoelectric properties of c-axis oriented Pb(Zr,Ti)O3 thin filmsApplied Physics Letters, 1997