PROCESSING AND CHARACTERIZATION OF PIEZOELECTRIC MATERIALS AND INTEGRATION INTO MICROELECTROMECHANICAL SYSTEMS
- 1 August 1998
- journal article
- Published by Annual Reviews in Annual Review of Materials Science
- Vol. 28 (1), 563-597
- https://doi.org/10.1146/annurev.matsci.28.1.563
Abstract
▪ Abstract Piezoelectric materials have been integrated with silicon microelectromechanical systems (MEMS) in both microsensor and microactuator applications. Thin-film materials selection and processing routes are reviewed. Some recent and emerging applications of piezoelectric MEMS are presented including acoustic emission microsensors, vibration monitors, molecular recognition biosensors, precision positioners, micropumps, and linear stepper motors.Keywords
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