CMOS integrated tactile sensor array by porous Si bulk micromachining
- 10 March 2008
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 142 (1), 192-195
- https://doi.org/10.1016/j.sna.2007.08.003
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Characterization of an Integrable Single-Crystalline 3-D Tactile SensorIEEE Sensors Journal, 2006
- A traction stress sensor array for use in high-resolution robotic tactile imagingJournal of Microelectromechanical Systems, 2000
- Silicon three-axial tactile sensorSensors and Actuators A: Physical, 1996