Characterization of an Integrable Single-Crystalline 3-D Tactile Sensor
- 24 July 2006
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Sensors Journal
- Vol. 6 (4), 928-934
- https://doi.org/10.1109/jsen.2006.877990
Abstract
Porous-Si-micromachining technique was used for the formation of single-crystalline force-sensor elements, capable of resolving the three vector components of the loading force. Similar structures presented so far are created from deposited polycrystalline Si resistors embedded in multilayered SiO2/Si3N4 membranes, using surface micromachining technique for a cavity formation. In this paper, the authors implanted four piezoresistors in an n-type-perforated membrane, having their reference pairs on the substrate in order to form four half bridges for the transduction of the mechanical stress. They successfully combined the HF-based porous-Si process with conventional doping and Al metallization, thereby offering the possibility of integration with readout and amplifying electronics. The 300times300 mum2 membrane size allows for the formation of large tactile arrays using single-crystalline-sensing elements of superior mechanical properties. They used the finite-element method for modeling the stress distribution in the sensor, and verified the results with real measurements. Finally, they covered the sensors with different elastic silicon-rubber layers, and measured the sensor's altered properties. They used continuum mechanics to describe the behavior of the rubber layerThis publication has 7 references indexed in Scilit:
- Spatial filtering characteristic of elastic cover for tactile sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A traction stress sensor array for use in high-resolution robotic tactile imagingJournal of Microelectromechanical Systems, 2000
- A silicon-based shear force sensor: development and characterizationSensors and Actuators A: Physical, 2000
- Basic Solid Mechanics for Tactile SensingThe International Journal of Robotics Research, 1985
- Contact MechanicsPublished by Cambridge University Press (CUP) ,1985
- Tactile spatial resolution. III. A continuum mechanics model of skin predicting mechanoreceptor responses to bars, edges, and gratingsJournal of Neurophysiology, 1981
- Tactile spatial resolution. II. Neural representation of Bars, edges, and gratings in monkey primary afferentsJournal of Neurophysiology, 1981