Microstructure modification of silver films deposited by ionized magnetron sputter deposition
- 1 September 1999
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 17 (5), 2891-2895
- https://doi.org/10.1116/1.581956
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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