Etching and Optical Characteristics in GaAs/GaAlAs Surface Emitting Laser Fabrication Using a Novel Spray Etch
- 1 May 1992
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 31 (5S)
- https://doi.org/10.1143/jjap.31.1597
Abstract
We present some results on a novel spray wet etch technique and surface characterization in forming short cavity structures for GaAs/GaAlAs vertical cavity surface emitting lasers. A completely flat epitaxial surface was obtained for the output-side mirror by selectively removing the GaAs substrate. The surface reflectivity was uniform and the reproducibility was drastically improved.This publication has 6 references indexed in Scilit:
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