Bandwidth characteristics and comparisons of surface texture measuring instruments
- 25 January 2010
- journal article
- Published by IOP Publishing in Measurement Science and Technology
Abstract
No abstract availableKeywords
This publication has 24 references indexed in Scilit:
- Measurement of Steep Surfaces Using White Light InterferometryStrain, 2010
- Optical tomography and digital holographyMeasurement Science and Technology, 2008
- The development of user-friendly software measurement standards for surface topography software assessmentWear, 2008
- Advances in engineered surfaces for functional performanceCIRP Annals, 2007
- Surface measurement errors using commercial scanning white light interferometersMeasurement Science and Technology, 2007
- Surface metrology algorithm testing systemPrecision Engineering, 2007
- Interpreting interferometric height measurements using the instrument transfer functionPublished by Springer Science and Business Media LLC ,2006
- Measurement capabilities of optical 3D-sensors for MST applicationsMicroelectronic Engineering, 1998
- Calibration of numerical aperture effects in interferometric microscope objectivesApplied Optics, 1989
- Algorithms to Deconvolve Stylus Geometry From Surface Profile MeasurementsJournal of Engineering for Industry, 1985