Surface measurement errors using commercial scanning white light interferometers
Open Access
- 17 December 2007
- journal article
- Published by IOP Publishing in Measurement Science and Technology
Abstract
No abstract availableKeywords
This publication has 20 references indexed in Scilit:
- The distorted helix: thin film extraction from scanning white light interferometryPublished by SPIE-Intl Soc Optical Eng ,2006
- Dispersion error in white-light Linnik interferometers and its implications for evaluation proceduresApplied Optics, 2001
- Fringe modulation skewing effect in white-light vertical scanning interferometryApplied Optics, 2000
- Improved vertical-scanning interferometryApplied Optics, 2000
- High-speed noncontact profiler based on scanning white-light interferometryApplied Optics, 1994
- Three-dimensional sensing of rough surfaces by coherence radarApplied Optics, 1992
- Mirau correlation microscopeApplied Optics, 1990
- Surface Profiles Obtained by Means of Optical Methods — Are They True Representations of the Real Surface?CIRP Annals, 1990
- Calibration of numerical aperture effects in interferometric microscope objectivesApplied Optics, 1989
- White-Light Interferometric Thickness GaugeApplied Optics, 1972