Negative Ion Density Measurements in Reactive Magnetron Sputtering
Open Access
- 1 June 2009
- journal article
- pse proceedings---full-paper
- Published by Wiley in Plasma Processes and Polymers
- Vol. 6 (S1), S615-S619
- https://doi.org/10.1002/ppap.200931606
Abstract
No abstract availableKeywords
Funding Information
- EPSRC
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