Excimer laser micro machining of inorganic dielectrics
- 1 October 1996
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 106, 282-286
- https://doi.org/10.1016/s0169-4332(96)00422-9
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
- Femtosecond-pulse visible laser processing of transparent materialsApplied Surface Science, 1996
- LASER MICROMACHININGOptics and Photonics News, 1995
- Excimer laser ablation patterning of dielectric layersApplied Surface Science, 1995
- Fabrication of refractive microlens arrays by excimer laser ablation of amorphous TeflonApplied Optics, 1993
- Laser ablation studies of magnesium oxideApplied Surface Science, 1993
- Glass surface treatment with excimer and CO2 lasersApplied Surface Science, 1990
- Picosecond laser sputtering of sapphire at 266 nmApplied Physics Letters, 1989
- Micropatterning of surfaces by excimer laser projectionJournal of Vacuum Science & Technology B, 1989
- Direct production of gratings on plastic substrates using 248-nm KrF laser radiationApplied Optics, 1987
- Importance of Fresnel reflections in laser surface damage of transparent dielectricsApplied Physics Letters, 1972