A physical model to predict stiction in MEMS
- 12 August 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (5), 702-713
- https://doi.org/10.1088/0960-1317/12/5/329
Abstract
One of the most important reliability problems in micro-electromechanical systems (MEMSs) is stiction, the adhesion of contacting surfaces due to surface forces. After reviewing the known physical theory, and the measurement method commonly used to investigate stiction, we present a model that can be used to investigate the sensitivity of MEMS to stiction. It quantitatively predicts the surface interaction energy of surfaces in contact. Included in the model is the roughness of the contacting surfaces and the environmental conditions (humidity and temperature). This is done by describing the surface interaction energy as a function of the distance between the surfaces. This distance is not a unique number, but rather a distribution of distances. It is shown that, if we know this distribution, we can calculate the surface interaction energy. The model is suitable for the prediction of forces due to capillary condensation and molecular interactions.Keywords
This publication has 18 references indexed in Scilit:
- Stiction-controlled locking system for three-dimensional self-assembled microstructures: Theory and experimental validationApplied Physics Letters, 2001
- Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developmentsSensors and Actuators A: Physical, 2000
- Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)Sensors and Actuators A: Physical, 1998
- Critical Review: Adhesion in surface micromechanical structuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Stiction in surface micromachiningJournal of Micromechanics and Microengineering, 1996
- Total dose effects on Microelectromechanical Systems (MEMS): accelerometersIEEE Transactions on Nuclear Science, 1996
- The effects of radiation on MEMS accelerometersIEEE Transactions on Nuclear Science, 1996
- Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanismsSensors and Actuators A: Physical, 1994
- Mechanical stability and adhesion of microstructures under capillary forces. II. ExperimentsJournal of Microelectromechanical Systems, 1993
- Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theoryJournal of Microelectromechanical Systems, 1993