Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
- 15 May 2000
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 82 (1-3), 219-223
- https://doi.org/10.1016/s0924-4247(99)00337-4
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
- A simple experimental technique for the measurement of the work of adhesion of microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Control tribological and mechanical properties of MEMS surfaces. Part 1: critical reviewMicrosystem Technologies, 1999
- Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachinesJournal of Microelectromechanical Systems, 1998
- Observation of Three Growth Mechanisms in Self-Assembled MonolayersThe Journal of Physical Chemistry B, 1998
- Surface processes in MEMS technologySurface Science Reports, 1998
- Friction and wear in surface-micromachined tribological test devicesPublished by SPIE-Intl Soc Optical Eng ,1997
- Critical Review: Adhesion in surface micromechanical structuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Stiction in surface micromachiningJournal of Micromechanics and Microengineering, 1996
- Performance Impact of Monolayer Coating of Polysilicon MicromotorsJournal of the Electrochemical Society, 1995
- An Intrinsic Relationship between Molecular Structure in Self-Assembled n-Alkylsiloxane Monolayers and Deposition TemperatureThe Journal of Physical Chemistry, 1994