Laser direct writing of copper on polyimide surfaces from solution
- 1 February 2000
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 154-155, 399-404
- https://doi.org/10.1016/s0169-4332(99)00455-9
Abstract
No abstract availableKeywords
This publication has 19 references indexed in Scilit:
- Low resistivity LCVD direct write Cu conductor lines for IC customisationPhysica Scripta, 1997
- Laser-assisted chemical vapor deposition of nickel and laser cutting in integrated circuit restructuringPhysica Scripta, 1997
- Direct writing of gold and copper lines from solutionsApplied Surface Science, 1996
- Copper patterning on dielectrics by laser writing in liquid solutionApplied Physics Letters, 1994
- Large scale two-step selective aluminum CVD on laser patterned palladium linesApplied Surface Science, 1994
- High deposition rate laser direct writing of Al on SiApplied Physics Letters, 1991
- Laser-induced deposition of Ni lines on ferrite in NiSO4 aqueous solutionApplied Physics A, 1991
- Laser-Induced Metal Deposition From The Liquid PhasePublished by SPIE-Intl Soc Optical Eng ,1989
- Laser-induced metal deposition on semiconductors from liquid electrolytesApplied Physics Letters, 1989
- Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinumApplied Physics A, 1987