Structural stability of ultrathin silicon oxynitride film improved by incorporated nitrogen
- 1 March 2001
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 173 (3-4), 171-176
- https://doi.org/10.1016/s0169-4332(00)00548-1
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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