Optimization of Variable-Capacitance Micromotor Using Genetic Algorithm
- 10 February 2011
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 20 (2), 497-504
- https://doi.org/10.1109/JMEMS.2011.2105247
Abstract
In this paper, the optimization shape of a polysilicon variable-capacitance micromotor (VCM) was determined using genetic algorithm (GA). The optimum goal of the algorithm was found for a maximum torque value and a minimum torque ripple, following changing the geometric parameters. The optimization process was carried out using a combination of GA and finite-element method (FEM). The fitness value was calculated by FEM analysis using COMSOL3.4, and the GA was realized by MATLAB7.4. The proposed method has been applied for the two case studies, and it has been also compared with successive sampling method. The results show that the optimized micromotor using GA had a higher torque value and a lower torque ripple, indicating the validity of this methodology for VCM design.Keywords
This publication has 19 references indexed in Scilit:
- Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball BearingsJournal of Microelectromechanical Systems, 2008
- An explicit drive algorithm for aiding the design of firing sequence in side-drive micromotorCommunications in Numerical Methods in Engineering, 2008
- Spline Functions: Basic TheoryPublished by Cambridge University Press (CUP) ,2007
- Analysis and Optimization of MEMS Electrostatic MicroactuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2007
- Genetic Algorithms in ElectromagneticsPublished by Wiley ,2006
- An electric induction micromotorJournal of Microelectromechanical Systems, 2005
- Electrostatic micromotor and its reliabilityMicroelectronics Reliability, 2005
- Micromachines: principles of operation, dynamics, and controlPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A new FEM approach for field and torque simulation of electrostatic microactuatorsJournal of Microelectromechanical Systems, 2002
- 3-D computer aided analysis of the "Berkeley" electrostatic micromotorIEEE Transactions on Magnetics, 1995