3-D computer aided analysis of the "Berkeley" electrostatic micromotor
- 1 May 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 31 (3), 2108-2111
- https://doi.org/10.1109/20.376461
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Micromotor fabricationIEEE Transactions on Electron Devices, 1992
- In situ friction and wear measurements in integrated polysilicon mechanismsSensors and Actuators A: Physical, 1990
- IC-processed electrostatic micromotorsSensors and Actuators, 1989