Relation of hardness and oxygen flow of Al2O3 coatings deposited by reactive bipolar pulsed magnetron sputtering
- 15 September 2005
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 494 (1-2), 255-262
- https://doi.org/10.1016/j.tsf.2005.08.162
Abstract
No abstract availableKeywords
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