A first functional current excited planar rotational magnetic micromotor
- 30 December 2002
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Preliminary results for a planar microdynamometerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Operational characteristics of microfabricated electric motorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Electric micromotor dynamicsIEEE Transactions on Electron Devices, 1992
- Fabrication and testing of the planar magnetic micromotorJournal of Micromechanics and Microengineering, 1991
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986