Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
- 1 May 1986
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 4 (1), 35-56
- https://doi.org/10.1016/0167-9317(86)90004-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Present status and problems of X-ray lithographyPublished by Springer Science and Business Media LLC ,2008
- Production and use of nuclear tracks: imprinting structure on solidsReviews of Modern Physics, 1983
- Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplasticsThe Science of Nature, 1982
- Silicon as a mechanical materialProceedings of the IEEE, 1982