Nanocomposite coatings within the system Ti–B–N deposited by plasma assisted chemical vapor deposition
- 1 May 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 21 (3), 1084-1091
- https://doi.org/10.1116/1.1570846
Abstract
No abstract availableThis publication has 25 references indexed in Scilit:
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