Wide range semiconductor flow sensors
- 25 August 2000
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 85 (1-3), 139-146
- https://doi.org/10.1016/s0924-4247(00)00370-8
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurementSensors and Actuators A: Physical, 1998
- Adaptive controlled thermal sensor for measuring gas flowSensors and Actuators A: Physical, 1998
- An invasive catheter flow sensor with on-chip CMOS readout electronics for the on-line determination of blood flowSensors and Actuators A: Physical, 1996
- The μ-flown: a novel device for measuring acoustic flowsSensors and Actuators A: Physical, 1996
- Pyroelectric anemometry: Vector and swirl measurementsSensors and Actuators A: Physical, 1995
- Microminiaturized thermistor arrays for temperature gradient, flow and perfusion measurementsSensors and Actuators A: Physical, 1991
- Silicon gas flow sensors using industrial CMOS and bipolar IC technologySensors and Actuators A: Physical, 1991
- Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride filmsSensors and Actuators A: Physical, 1990
- Resonating microbridge mass flow sensorSensors and Actuators A: Physical, 1990