Silicon gas flow sensors using industrial CMOS and bipolar IC technology
- 31 May 1991
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 27 (1-3), 577-581
- https://doi.org/10.1016/0924-4247(91)87054-7
Abstract
No abstract availableKeywords
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