Combined Atomic Layer and Chemical Vapor Deposition, and Selective Growth of Ge2Sb2Te5 Films on TiN/W Contact Plug
- 14 August 2007
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 19 (18), 4387-4389
- https://doi.org/10.1021/cm071313x
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Cyclic PECVD of Ge[sub 2]Sb[sub 2]Te[sub 5] Films Using Metallorganic SourcesJournal of the Electrochemical Society, 2007
- Overview of Phase-Change Chalcogenide Nonvolatile Memory TechnologyMRS Bulletin, 2004