Measurement technologies for precision positioning
Top Cited Papers
- 15 June 2015
- journal article
- Published by Elsevier BV in CIRP Annals
- Vol. 64 (2), 773-796
- https://doi.org/10.1016/j.cirp.2015.05.009
Abstract
No abstract availableKeywords
This publication has 100 references indexed in Scilit:
- Machine tools for large partsCIRP Annals, 2013
- Manufacturing and measurement of freeform opticsCIRP Annals, 2013
- A noncontact scanning electrostatic force microscope for surface profile measurementCIRP Annals, 2012
- A three-axis autocollimator for detection of angular error motions of a precision stageCIRP Annals, 2011
- Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoderMeasurement Science and Technology, 2010
- Self-calibration of divided circles on the basis of a prime factor algorithmMeasurement Science and Technology, 2007
- Modelling and optimization of novel laser multilateration schemes for high-precision applicationsMeasurement Science and Technology, 2005
- Calibration of multi-beam laser tracking systemsRobotics and Computer-Integrated Manufacturing, 2003
- The measurement uncertainties in the laser interferometry-based sensing and tracking techniqueMeasurement, 2002
- Interferometric measurement of absolute distances of up to 40 mMeasurement, 1995