Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients
- 23 September 2005
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 123-124, 555-562
- https://doi.org/10.1016/j.sna.2005.03.075
Abstract
No abstract availableKeywords
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