The influence of mechanical shock on the operation of electrostatically driven RF-MEMS switches
- 21 August 2004
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 14 (9), S49-S54
- https://doi.org/10.1088/0960-1317/14/9/008
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Modified Reynolds equation and analytical analysis of squeeze-film air damping of perforated structuresJournal of Micromechanics and Microengineering, 2003
- MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiPJournal of Micromechanics and Microengineering, 2003
- A physical model to predict stiction in MEMSJournal of Micromechanics and Microengineering, 2002
- The reliability of microelectromechanical systems (MEMS) in shock environmentsJournal of Microelectromechanical Systems, 2002
- RF MEMS switches and switch circuitsIEEE Microwave Magazine, 2001
- Dimensional analysis and the pi theoremLinear Algebra and its Applications, 1982