Micromachined polysilicon microscanners for barcode readers
- 1 December 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 8 (12), 1707-1709
- https://doi.org/10.1109/68.544726
Abstract
We describe the design and fabrication of micromachined resonant scanners that have large scan angles at fast scan speeds. Driven by an electrostatic combdrive actuator, these 200 /spl mu/m/spl times/250 /spl mu/m micromirrors have a maximum scan angle of 28/spl deg/ (optical) at a resonant frequency of 3 kHz when driven by a sinusoidal voltage of 9.5 V (amplitude) superimposed on a 30-V dc bias. Fabricated with a four-layer polysilicon-surface-micromachining process, these resonant scanners are compact, extremely light in weight, potentially very low in cost, and operate at very low power levels. Using the scanner as a laser-beam deflector, we have demonstrated a barcode reader system.Keywords
This publication has 5 references indexed in Scilit:
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