Silicon-micromachined micromirrors with integrated high-precision actuators for external-cavity semiconductor lasers
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 8 (1), 95-97
- https://doi.org/10.1109/68.475790
Abstract
We present an actuated silicon-micromachined micromirror with continuous and highly accurate position adjustment designed to be used in the construction of external-cavity semiconductor-laser modules. In our initial design, a positioning accuracy better than /spl plusmn/0.2 μm for the actuated micromirrors is obtained. The mechanical robustness, small size, and fine-positional precision of the actuated micromirrors are sufficient for external-cavity-laser applications. In production, the cost of these miniature external-cavity-laser systems should be low because they are batch-processed.Keywords
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