Si-based guided-mode resonance filter on a micro-optical bench

Abstract

An out-of-plane guided-mode resonance filter on a single Si chip using a two-layer polysilicon surface micromachining process has been proposed. To the best of the authors' knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon micro-optical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550 and 1310 nm could be as low as 40 dB and the channel passband at 1550 nm was 20 nm.