Laser-to-fiber coupling module using a micromachined alignment mirror
- 1 March 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 8 (3), 396-398
- https://doi.org/10.1109/68.481129
Abstract
We report the fabrication of a laser-to-fiber coupling module that incorporates a movable silicon-micromachined alignment micromirror. The micromirror can position a beam on a fiber within a 0.17 /spl mu/m standard deviation and has a range of motion of more than 200 /spl mu/m. Measurements on the module have shown a reproducible coupling efficiency of 40%. The coupling module provides a means to compensate for placement inaccuracies of passively assembled optical components.Keywords
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