A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer
- 19 May 2008
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
- Concept of a miniature optical spectrometer using integrated optical and micro-optical componentsApplied Optics, 2006
- A simple miniature optical spectrometer with a planar waveguide grating coupler in combination with a plano-convex lensOptics Express, 2006
- MEMS-based optical mini- and microspectrometers for the visible and infrared spectral rangeJournal of Micromechanics and Microengineering, 2005
- Spectral Performance of a Micromachined Infrared Spectrum Analyzer in SiliconIEEE Transactions on Instrumentation and Measurement, 2005
- Planar reflection grating lens for compact spectroscopic imaging systemApplied Optics, 2003
- Selffocussing phase transmission grating for an integrated optical microspectrometerSensors and Actuators A: Physical, 2001
- Model of thermoelectric radiation sensors made by CMOS and micromachiningSensors and Actuators A: Physical, 1992
- Integrated grating/detector array fabricated in silicon using micromachining techniquesSensors and Actuators A: Physical, 1992
- Miniaturized spectrometer employing planar waveguides and grating couplers for chemical analysisApplied Optics, 1990
- Planar Rowland spectrometer for fiber-optic wavelength demultiplexingOptics Letters, 1981