Economical Sputtering System To Produce Large-Size Composition-Spread Libraries Having Linear and Orthogonal Stoichiometry Variations
- 27 July 2002
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 14 (8), 3519-3523
- https://doi.org/10.1021/cm020236x
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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