Discovery of a useful thin-film dielectric using a composition-spread approach
- 1 March 1998
- journal article
- letter
- Published by Springer Science and Business Media LLC in Nature
- Vol. 392 (6672), 162-164
- https://doi.org/10.1038/32381
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO3 thin films grown by chemical vapor depositionJournal of Applied Physics, 1997
- (Ba, Sr)TiO3 Films Prepared by Liquid Source Chemical Vapor Deposition on Ru ElectrodesJapanese Journal of Applied Physics, 1996
- Electrical properties of (Zr,Sn)TiO4 dielectric thin film prepared by pulsed laser depositionJournal of Applied Physics, 1996
- Fabrication and Electrical Characterization of Pt/(Ba,Sr)TiO3/Pt Capacitors for Ultralarge-Scale Integrated Dynamic Random Access Memory ApplicationsJapanese Journal of Applied Physics, 1996
- Relationships between dopants, microstructure and the microwave dielectric properties of ZrO2-TiO2-SnO2 ceramicsJournal of Materials Science, 1992
- dc Electrical Degradation of Perovskite‐Type Titanates: I, CeramicsJournal of the American Ceramic Society, 1990
- dc Electrical Degradation of Perovskite‐Type Titanates: III, A Model of the MechanismJournal of the American Ceramic Society, 1990
- Existence range, structural and dielectric properties of ZrxTiySnzO4 ceramics (x+y+z=2)Materials Research Bulletin, 1981
- The ?multiple-sample concept? in materials research: Synthesis, compositional analysis and testing of entire multicomponent systemsJournal of Materials Science, 1970
- Cation Deficiencies in RF Sputtered Gadolinium Iron Garnet FilmsIBM Journal of Research and Development, 1969