Abstract
The spectral response from shallow negative donor ions in silicon has been studied over a range of donor concentrations between 1×1014 and 1×1017 cm3. At low donor concentrations the binding energy of the negative-ion state is well described by the effectivemass theory. The formation of the upper Hubbard band out of these states is observed at a donor concentration of 3×1015 cm3—about three orders of magnitude lower than the concentration at which the metal-insulator transition occurs in this material.