Prediction of surface and adhesion energies of nanoimprint lithography materials and anti-sticking layers by molecular dynamics simulation
- 1 May 2012
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 258 (14), 5438-5442
- https://doi.org/10.1016/j.apsusc.2012.02.031
Abstract
No abstract availableKeywords
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