Deformation of Nanoscopic Polymer Structures in Response to Well‐Defined Capillary Forces
- 17 July 2003
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 15 (14), 1180-1184
- https://doi.org/10.1002/adma.200305059
Abstract
The development of strategies to measure the properties of materials with nanoscopic dimensions is a necessary but challenging topic in nanoscale science and technology. Here, combinatorial arrays of specially designed test structures are used to quantify the deformation of micro- and nanoscale polymer beams in response to well-defined capillary forces. In the Figure, increasing capillary forces from left to right act on beams 95 nm wide.Keywords
This publication has 25 references indexed in Scilit:
- Extraordinary elevation of the glass transition temperature of thin polymer films grafted to silicon oxide substratesThe Journal of Chemical Physics, 2001
- Dependence of the Glass Transition Temperature of Polymer Films on Interfacial Energy and ThicknessMacromolecules, 2001
- Direct Measurement of Resist Pattern Adhesion on the Surface with Silane-coupling Treatment by Atomic Force Microscope(AFM.)Journal of Photopolymer Science and Technology, 2001
- On-wafer characterization of thermomechanical properties of dielectric thin films by a bending beam techniqueJournal of Applied Physics, 2000
- Small Molecule Probe Diffusion in Thin and Ultrathin Supported Polymer FilmsMacromolecules, 1998
- Effect of Free Surfaces on the Glass Transition Temperature of Thin Polymer FilmsPhysical Review Letters, 1996
- Mapping the local Young's modulus by analysis of the elastic deformations occurring in atomic force microscopyNanotechnology, 1995
- Mechanism of Resist Pattern CollapseJournal of the Electrochemical Society, 1993
- Patterning Characteristics of a Chemically-Amplified Negative Resist in Synchrotron Radiation LithographyJapanese Journal of Applied Physics, 1992
- A method for interpreting the data from depth-sensing indentation instrumentsJournal of Materials Research, 1986