Investigation on optical and microstructural properties of photoluminescent LPCVD SiOxNy thin films
- 31 July 2001
- journal article
- Published by Elsevier BV in Optical Materials
- Vol. 17 (1-2), 145-148
- https://doi.org/10.1016/s0925-3467(01)00038-6
Abstract
No abstract availableKeywords
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